Deep learning-based defect classification and detection in SEM images
spiedigitallibrary.org
Deep learning-based defect classification and detection in SEM images
Defect inspection in semiconductor processes has become a challenging task due to continuous shrink of device patterns (pitches less than 32 nm) as we move from node to node. Current state-of-the-art defect detection tools (optical/e-beam) have certain limitations as these tools are driven by some rule-based techniques for defect classification ...
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